Product descriptions
VACUUM ROBOT OVERHAUL
Repair / MATTSON SUPREMA
Consumability Parts Replacement, Overhaul
THETA2 Bellows Vacuum Robot – P/N: 3004362
THETA1 Bellows Vacuum Robot – P/N: 3004363
THETA2 Quad Seal Vacuum Robot – P/N: 263-24574-00
THETA1 Quad Seal Vacuum Robot – P/N: 263-24576-00
- Replace Bearing and Timing Belt
- Replace Cylinder and Quad Seal
- Check and replace Smart Motor
- Proceed with Cycle Test → Test after installation in the actual facility
Lead Time: 5~6 weeks
Warranty: 4 months
THETA1 Bellows Vacuum Robot – P/N: 3004363
THETA2 Quad Seal Vacuum Robot – P/N: 263-24574-00
THETA1 Quad Seal Vacuum Robot – P/N: 263-24576-00
- Replace Bearing and Timing Belt
- Replace Cylinder and Quad Seal
- Check and replace Smart Motor
- Proceed with Cycle Test → Test after installation in the actual facility
Lead Time: 5~6 weeks
Warranty: 4 months