Product descriptions
QUAD SEAL SLIT VALVE
Repair / MATTSON SUPREMA
Consumability Parts Replacement& Overhaul
PM Quad Seal Slit Valve – P/N: 3002027
LL Quad Seal Slit Valve – P/N: 3002028
- Replacing bellows and cyclinder
- Replace various bushing and bearing
- Vacuum Leak and Drive Test
Lead Time: 2~3 weeks
Warranty: 4 months
LL Quad Seal Slit Valve – P/N: 3002028
- Replacing bellows and cyclinder
- Replace various bushing and bearing
- Vacuum Leak and Drive Test
Lead Time: 2~3 weeks
Warranty: 4 months